A list of the departments that were involved in the development of ISO 14644-3:2005 is available at: http://www.iso.org/iso/home/store/catalogue_ics/catalogue_detail_ics.htm?csnumber=563&lang=en
ISO 14644-3:2005 defines the principles of the classification of airborne particulate cleanliness in cleanrooms and clean zones. It specifies performance tests for two types of cleanrooms and clean zones: those with unidirectional airflow; and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest, and operational. If the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several alternative methods and apparatus are recommended to accommodate different end-use considerations.
Ascleanrooms include all phases of the engineering sciences, themeasurement and test methods related to cleanrooms were numerous. WG 3was requested by ISO/TC 209 to use the following policy to decide whichitems to include in the document:If there are any previouslyestablished standards on the subject, refer to them. Include itemsaccording to the requests or needs of other Working Groups.The most important objectives of this document are to provide aninternationally common basis of measurement and evaluation of cleanroomsand, at the same time, not to prevent the introduction of newtechnologies. The latter is the reason that the part of this Standardrelated to instrumentation is Informative. The document was submitted asan American National Standard and has been adopted as ANSI/IEST/ISO14644-3:2005 in the United States.
Thus, the LSM images have revealed the crack behaviors of the Ti film on the PDMS substrates at the micro- and nanoscales. The LSM images are found to be consistent with the optical microscopy images, as shown in Figure 2g,h. From the results obtained so far, it is found that the crack formation mainly occurs during the deformation of the PDMS substrate, and that the crack behaviors are strain dependent. The crack density is larger in the undeformed areas and becomes smaller as the strain becomes larger.
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